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Location: Main > Optical Substrates > Quartz Substrates Plates Wafers > QUZS-S-S-01500150-0020
Name: 15.0x15.0xT0.2mm Synthetic Quartz Substrate(S)
P/N: QUZS-S-S-01500150-0020
Keywords:15.0x15.0xT0.2mm,UV Synthetic Quartz,Ra<2A
Unit Price: S$125.00/pc
Available: Call us
Request: Add to Request List
Introduction:
Applications of Synthetic Quartz Glass Substrates include photomask substrates in the semiconductor industry, poly-Si-TFT substrates for LCDs, micro lens substrates
for LCDs and fiber optics, substrates for high frequency (RF) applications, microfluidic substrates, Nano-Imprint Templates, and DNA chip substrates.
Click here to download Synthetic Quartz Glass Substrates Datasheet
S-Grade Synthetic Quartz Glass Substrates feature Ra<2A surface quality (Double Side Typ.) per semiconductor standard.
Substrate Material:  Synthetic Quartz Glass, VIOSIL
Outer Dimension:  15.0x15.0,-0.1/+0.0mm
Thickness:  0.20,+/-0.03mm
Surface Quality:  Double side fine polished, S-Grade, Ra<2A(RMS)
Flatness:   Lambda/10 @ 632.8nm over 1-inch area on-jig tested
Parallelism:  <10 arc secs
Chamfer:  <0.1mmx45deg

Features of Synthetic Quartz Glass Substrates include
Purity: high purity completely eliminates contamination.
Chemical resistance: high stability against a variety of solvents.
Heat resistance: high dimensional stability over a wide temperature range.
Transparency: high transmissivity over a wide range of wavelengths from UV to IR.
Fluorescence: no fluorescence over a wide range of wavelengths from UV to IR.
Dielectric properties: low dielectric loss even at GHz frequencies.
Surface: high flatness, high uniformity of thickness and smooth surface, thanks to techniques developed for photomask substrates used in LSI manufacturing.