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Photomask Reticle > Photomask Reticle Blanks > PBSL-6012
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| Name: | 6-inch Soda-lime Glass Photomask Blank(SL6012) |
| P/N: | PBSL-6012 | | Keywords: | Soda Lime Photomask Blank,6-inch/T3.0mm,MOQ10pcs |
| Unit Price: |
S$310.00/pc
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| Available: |
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| Request: |
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| Introduction: | Photomask blank is a semi-grade glass substrate coated with Chrome layer and Photoresist layer, used for photolithography.
Etchable in all conventional Wet Etch systems.
Plasma Grade recommended for Dry Etching systems.
Deposited Chrome:
THICKNESS & OPTICAL DENSITY: Standard: 120 +/-10(nm) / O.D. = 2.8 +/-0.2 @ 530nm
PHOTORESIST: AZ-1518 Thickness 600 +/-15(nm)
Edges: chamfered 45deg on all substrates |
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| Substrate: |
Soda Lime Glass |
| Outer Dimension: |
6"x6" |
| Thickness: |
3.0mm(0.12") |
| Surface: |
Double sizes fine polished, inspected to be free of glass defects >2um |
| Chrome Coating: |
Vacuum deposited, DC sputtering in class 100 environment |
| Chorme Thickness: |
Standard 120nm, OD=3.0@430nm (may customize thickness upto 5um) |
| Reflectivity: |
Low: <12% @400nm |
| Photoresist: |
Shipley 1800 or AZ1500 filtered to 0.2um at point of use, all widely used positive and negative optical and E-beam resist available. |
| Packing: |
10pcs per cassette; MOQ 10pcs; Vacuum packed | |
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Optical Substrates
Photomask Reticle
Soda Lime Glass Photomasks Reticles
