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Location: Main > Photomask Reticle > Photomask Reticle Blanks > PBSL-7012
Name: 7-inch Soda-lime Glass Photomask Blank(SL7012)
P/N: PBSL-7012
Keywords:Soda Lime Photomask Blank,7-inch/T3.0mm,MOQ10pcs
Unit Price: S$310.00/pc
Available: Call us
Request: Add to Request List
Introduction:
Photomask blank is a semi-grade glass substrate coated with Chrome layer and Photoresist layer, used for photolithography.
Etchable in all conventional Wet Etch systems.
Plasma Grade recommended for Dry Etching systems.

Type Size(mm) Flatness(um) Thickness(mm)
SL7012 177.15-177. 177.65 <=15 2.97-3.27

Deposited Chrome:
THICKNESS & OPTICAL DENSITY: Standard: 120 +/-10(nm) / O.D. = 2.8 +/-0.2 @ 530nm

PHOTORESIST: AZ-1518 Thickness 600 +/-15(nm)

Edges: chamfered 45deg on all substrates
Substrate:  Soda Lime Glass
 Dimension:  127.0x127.0, +/-0.2mm (5"x5")
 Thickness:  2.3, +/-0.1mm (0.09")
 Surface:  Double sizes fine polished, inspected to be free of glass defects >2um 
 Chrome Coating:  Vacuum deposited, DC sputtering in class 100 environment
 Chorme Thickness:  Standard 120nm, OD=3.0@430nm (may customize with thickness up to 5um)
 Reflectivity:  Low: <12% @400nm; Mid: <33% @400nm; Hi: <55% @400nm 
 Photoresist:

 Shipley 1800 or AZ1500 filtered to 0.2um at point of use, all widely used positive and negative optical and E-beam resist available.

 
 
 
 
 
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